Presentation
Surface stress sensors for detection of chemical and biological species
Mechanical Engineering Conference Presentations, Papers, and Proceedings
Document Type
Conference Proceeding
Disciplines
Conference
Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2007
Publication Date
1-1-2007
DOI
doi:10.1117/12.715958
Geolocation
(32.715738, -117.16108380000003)
Abstract
A miniature differential surface stress sensor consisting of two adjacent micromachined cantilevers (a sensing/reference pair) is developed for detection of chemical and biological species. Presence of analyte species is detected by measuring the differential surface stress associated with adsorption/absorption of chemical species on sensing cantilever. A novel interferometric technique is utilized to measure the differential surface stress induced bending of sensing cantilever with respect to reference cantilever. Sensor performance is characterized through measurement of surface stress associated with formation of alkanethiol self-assembled monolayers (SAMs) on gold coated sensing cantilever. Chemisorptions and self-assembly of alkanethiol molecules onto the gold-coated cantilever surface leads to development of compressive surface stress. Magnitude of measured surface stress compares well with data reported in literature.
Copyright Owner
Society of Photo-Optical Instrumentation Engineers
Copyright Date
2007
Language
en
Citation Information
K. Kang, J. Marquardt and Pranav Shrotriya. "Surface stress sensors for detection of chemical and biological species" San Diego, CA(2007) Available at: http://works.bepress.com/pranav_shrotriya/15/
This is a conference proceeding from Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2007 6529 (2007): 1, doi:10.1117/12.715958. Posted with permission.
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