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Selected Works of Peter M. Hoffmann
Article
Development of Micro Scanning Multiprobes for Material Characterization
Sensor Letters (2008)
  • Peter M. Hoffmann
  • Y. Li
  • Q. Zheng
  • Z. Wang
  • R. Katragadda
  • W. Khalid
  • R. P. Panguluri
  • B. Nadgorny
  • Y. Xu
Link
Abstract
This paper reports the development of micro scanning 12-point probes. The microprobes are Au-coated 1 mu m thick SiO2 cantilevers with sharp tips of about 100 nm diameters. The lengths of probes range from 100 mu m to 300 mu m with the minimum spacing between probes being 4 mu m. A theoretical analysis of the relationship between the deflection of the probes and the residual stress of SiO2 is presented. A method of compensating this residual stress and making the cantilever flatter is also reported. In addition, an analytical model to calculate the maximum allowable displacement of the Au-SiO2 bimetallic cantilever has been developed and verified experimentally.
Disciplines
Publication Date
2008
DOI
https://doi.org/10.1166/sl.2008.045
Citation Information
Peter M. Hoffmann, Y. Li, Q. Zheng, Z. Wang, et al.. "Development of Micro Scanning Multiprobes for Material Characterization" Sensor Letters (2008)
Available at: http://works.bepress.com/peter_m_hoffmann/22/