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Article
Control of Oxygen and Carbon Related Crystal Defects in Silicon Processing
Materials Science and Engineering Faculty Research & Creative Works
  • P. D. Ownby, Missouri University of Science and Technology
  • P. E. Grayson
Department(s)
Materials Science and Engineering
Patent Number
4400232
Document Type
Patent
Document Version
Citation
File Type
text
Language(s)
English
Publication Date
8-1-1983
Citation Information
P. D. Ownby and P. E. Grayson. "Control of Oxygen and Carbon Related Crystal Defects in Silicon Processing" (1983)
Available at: http://works.bepress.com/p_ownby/119/