"Strength and weibull characterization of polysilicon membranes for mems applications" by Osama Jadaan

Selected Works of Osama Jadaan

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Strength and weibull characterization of polysilicon membranes for mems applications

Ceramic engineering and science proceedings (2007)

Osama Jadaan
Joseph Palko
Noel Nemeth
Anna Dubnisheva
Shuvo Roy
Aaron Fleischman

Disciplines

Materials Science and Engineering,
Structural Engineering and
Electrical and Electronics

Publication Date

January 1, 2007

Citation Information

Osama Jadaan, Joseph Palko, Noel Nemeth, Anna Dubnisheva, et al.. "Strength and weibull characterization of polysilicon membranes for mems applications" Ceramic engineering and science proceedings Vol. 27 Iss. 2 (2007) p. 557 - 568
Available at: http://works.bepress.com/osama-jadaan/43/