Aluminum Nitride Reconfigurable RF-MEMS Front-Ends2011 IEEE 9th International Conference on ASIC (ASICON 2011) (2011)
AbstractAluminum Nitride based piezoelectric microelectromechanical systems (MEMS) technology has the potential to develop a fully integrated radio frequency (RF) platform that satisfies the requirements of next-generation communication standards: reconfigurability, miniaturization, and low power consumption. Here we report on the recent developments of this AlN thin-film based technology, namely resonators, filters, oscillators and switches. These examples highlight how MEMS will enable the mass manufacturing of reconfigurable RF front-ends.
Publication DateOctober, 2011
Citation InformationAugusto Tazzoli, Matteo Rinaldi, Chengjie Zuo, Nipun Sinha, et al.. "Aluminum Nitride Reconfigurable RF-MEMS Front-Ends" 2011 IEEE 9th International Conference on ASIC (ASICON 2011) (2011)
Available at: http://works.bepress.com/mrinaldi/9/