Ultra-Thin-Film AlN Contour-Mode Resonators for Sensing ApplicationsDepartmental Papers (ESE)
AbstractThis paper reports on the design and experimental verification of a new class of ultra-thin-film (250 nm) aluminum nitride (AlN) microelectromechanical system (MEMS) contour mode resonators (CMRs) suitable for the fabrication of ultra-sensitive gravimetric sensors. The device thickness was opportunely scaled in order to increase the mass sensitivity, while keeping a constant frequency of operation. In this first demonstration the resonance frequency of the device was set to 178 MHz and a mass sensitivity as high as 38.96 KHz⋅μm2/fg was attained. This device demonstrates the unique capability of the CMR-S technology to decouple resonance frequency from mass sensitivity.
Document TypeConference Paper
Date of this Version4-1-2010
- gravimetric sensors; AlN contour-mode resonators; sensitivity; ultra-thin-film AlN.
Citation InformationMatteo Rinaldi, Chiara Zuniga and Gianluca Piazza. "Ultra-Thin-Film AlN Contour-Mode Resonators for Sensing Applications" (2010)
Available at: http://works.bepress.com/mrinaldi/14/