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Gravimetric chemical sensor based on the direct integration of SWNTS on ALN Contour-Mode MEMS resonators
Departmental Papers (ESE)
  • Matteo Rinaldi, University of Pennsylvania
  • Chiara Zuniga, University of Pennsylvania
  • Nipun Sinha, University of Pennsylvania
  • Marzie Taheri, University of Pennsylvania
  • Samuel M. Khamis, University of Pennsylvania
  • Alan T. Johnson, University of Pennsylvania
  • Gianluca Piazza, University of Pennsylvania
This paper reports on the first demonstration of a gravimetric chemical sensor based on direct integration of Single Wall Carbon Nanotubes (SWNTs) grown by Chemical Vapor Deposition (CVD) on AlN Contour-Mode MicroElectroMechanical (MEMS) resonators. In this first prototype the ability of SWNTs to readily adsorb volatile organic chemicals has been combined with the capability of AlN Contour-Mode MEMS resonator to provide for different levels of sensitivity due to separate frequencies of operation on the same die. Two devices with resonance frequencies of 287 MHz and 442 MHz have been exposed to different concentrations of DMMP in the range from 80 to 800 ppm. Values of mass sensitivity equal to 1.8 KHz/pg and 2.65 KHz/pg respectively have been measured.
Document Type
Journal Article
Date of this Version
Copyright 2008 IEEE. Reprinted from 2008 IEEE International Frequency Control, May 2008, pages 443-448.

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  • gravimetric sensors,
  • carbon nanotubes,
  • AlN contour-mode resonators,
  • DMMP
Citation Information
Matteo Rinaldi, Chiara Zuniga, Nipun Sinha, Marzie Taheri, et al.. "Gravimetric chemical sensor based on the direct integration of SWNTS on ALN Contour-Mode MEMS resonators" (2008) p. 443 - 448
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