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Ultra-Thin Super High Frequency Two-Port ALN Contour-Mode Resonators and Filters
Departmental Papers (ESE)
  • Matteo Rinaldi, University of Pennsylvania
  • Chiara Zuniga, University of Pennsylvania
  • Chnegjie Zuo, University of Pennsylvania
  • Gianluca Piazza, University of Pennsylvania
Document Type
Conference Paper
Date of this Version
Copyright 2009 IEEE. Reprinted from:

Rinaldi, M.; Zuniga, C.; Zuo, C.; Piazza, G., "Ultra-thin Super High Frequency two-port ALN contour-mode resonators and filters," Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International , vol., no., pp.577-580, 21-25 June 2009

Publisher URL:

Digital Object Identifier: 10.1109/SENSOR.2009.5285390

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This paper reports on the demonstration of a new class of ultra-thin (250 nm thick) super high frequency (SHF) AlN piezoelectric two-port resonators and filters. A thickness field excitation scheme was employed to excite a higher order contour extensional mode of vibration in an AlN nano plate (250 nm thick) above 3 GHz and synthesize a 1.96 GHz narrow-bandwidth channel-select filter. The devices of this work are able to operate over a frequency range from 1.9 to 3.5 GHz and are employed to synthesize the highest frequency MEMS filter based on electrically self-coupled AlN contour-mode resonators. Very narrow bandwidth (~ 0.35%) and high off-band rejection (~ 35 dB) were achieved at an operating frequency of 1.96 GHz. This first prototype showed insertion loss of 11 dB, which can be improved to few dB if parasitic elements are eliminated or device capacitance is increased.

  • Contour-Mode Resonators,
  • MEMS Resonators,
  • MEMS Filters,
  • NEMS
Citation Information
Matteo Rinaldi, Chiara Zuniga, Chnegjie Zuo and Gianluca Piazza. "Ultra-Thin Super High Frequency Two-Port ALN Contour-Mode Resonators and Filters" (2009)
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