Characterization of a Micromachined Parylene-Based Thermal C-Shape ActuatorJournal of Micromechanics and Microengineering (2011)
This paper describes the design, fabrication and characterization of parylene-based C-shape actuators. The actuators flatten out in response to temperature changes created by ohmic heating of built-in thin film resistors. The devices are fabricated by micromachining processes using parylene C and four metal layers. Mathematical modeling of operation temperature, displacement and load capacity was carried out and verified experimentally. The device operates on less than 0.33 V input voltage and 90 mA input current. During operation, the temperature of the actuator is less than 32 °C. This actuator has an 11 µN load capacity, 5 mm of tip displacement and a bandwidth of 1.4 Hz.
- Micromachined parylene based thermal actuator
Publication DateAugust 19, 2011
Citation InformationMinchul Shin, Aaron P. Gerratt, Cinzia Metallo, Alex Brindle, et al.. "Characterization of a Micromachined Parylene-Based Thermal C-Shape Actuator" Journal of Micromechanics and Microengineering Vol. 21 Iss. 9 (2011) p. 1 - 10 ISSN: 1361-6439
Available at: http://works.bepress.com/minchul-shin/6/