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Article
Characterization of a Micromachined Parylene-Based Thermal C-Shape Actuator
Journal of Micromechanics and Microengineering (2011)
  • Minchul Shin, Georgia Southern University
  • Aaron P. Gerratt, University of Maryland at College Park
  • Cinzia Metallo, Tufts University
  • Alex Brindle, Tufts University
  • Brian Kierstead, Tufts University
  • Robert D. White, Tufts University
Abstract
This paper describes the design, fabrication and characterization of parylene-based C-shape actuators. The actuators flatten out in response to temperature changes created by ohmic heating of built-in thin film resistors. The devices are fabricated by micromachining processes using parylene C and four metal layers. Mathematical modeling of operation temperature, displacement and load capacity was carried out and verified experimentally. The device operates on less than 0.33 V input voltage and 90 mA input current. During operation, the temperature of the actuator is less than 32 °C. This actuator has an 11 µN load capacity, 5 mm of tip displacement and a bandwidth of 1.4 Hz.
Keywords
  • Characterization,
  • Micromachined parylene based thermal actuator
Publication Date
August 19, 2011
DOI
10.1088/0960-1317/21/9/095028
Citation Information
Minchul Shin, Aaron P. Gerratt, Cinzia Metallo, Alex Brindle, et al.. "Characterization of a Micromachined Parylene-Based Thermal C-Shape Actuator" Journal of Micromechanics and Microengineering Vol. 21 Iss. 9 (2011) p. 1 - 10 ISSN: 1361-6439
Available at: http://works.bepress.com/minchul-shin/6/