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Article
Acoustic Doppler Velocity Measurement System using Capacitive Micromachined Ultrasound Transducer Array Technology
The Journal of the Acoustical Society of America (2013)
  • Minchul Shin, Georgia Southern University
  • Joshua S. Krause, Tufts University
  • Paul DeBitetto, Draper Laboratory
  • Robert D. White, Tufts University
Abstract
This paper describes the design, fabrication, modeling, and characterization of a small (1 cm2 transducer chip) acoustic Doppler velocity measurement system using microelectromechanical systems capacitive micromachined ultrasound transducer (cMUT) array technology. The cMUT sensor has a 185 kHz resonant frequency to achieve a 13° beam width for a 1 cm aperture. A model for the cMUT and the acoustic system which includes electrical, mechanical, and acoustic components is provided. Furthermore, this paper shows characterization of the cMUT sensor with a variety of testing procedures including Laser Doppler Vibrometry (LDV), beampattern measurement, reflection testing, and velocity testing. LDV measurements demonstrate that the membrane displacement at the center point is 0.4 nm/V2 at 185 kHz. The maximum range of the sensor is 60 cm (30 cm out and 30 cm back). A velocity sled was constructed and used to demonstrate measureable Doppler shifts at velocities from 0.2 to 1.0 m/s. The Doppler shifts agree well with the expected frequency shifts over this range.
Keywords
  • Acoustic,
  • Doppler velocity,
  • Measurement system,
  • Capacitive micromachined ultrasound transducer array technology
Publication Date
August, 2013
DOI
10.1121/1.4812249
Citation Information
Minchul Shin, Joshua S. Krause, Paul DeBitetto and Robert D. White. "Acoustic Doppler Velocity Measurement System using Capacitive Micromachined Ultrasound Transducer Array Technology" The Journal of the Acoustical Society of America Vol. 134 Iss. 2 (2013) p. 1011 - 1020 ISSN: 0001-4966
Available at: http://works.bepress.com/minchul-shin/5/