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Article
Acoustic Velocity Measurement System Using CMUT Technology and a Nickel-on-Glass Process
Sensors and Actuators A: Physical
  • Minchul Shin, Georgia Southern University
  • Zhengxin Zhao, Tufts University
  • Paul DeBitetto, Draper Laboratory
  • Robert D. White, Tufts University
Document Type
Article
Publication Date
2-1-2014
DOI
10.1016/j.sna.2013.12.025
Abstract

A micromachined array of 168 nickel-on-glass capacitive ultrasound transducers was used to demonstrate a long range Doppler velocity measurement system. By using an electroplated nickel on glass process, the total capacitance of the chip was reduced to 65 pF, resulting in a high signal to noise ratio and allowing an operable range of 1.5 m. The range is limited by room reverberation level, rather than electronic noise. The sensor array operates at a 180 kHz resonant frequency to achieve a half-angle −3 dB beamwidth of 6° with a 1 cm2 die. The cMUT array was characterized using laser Doppler vibrometry (LDV), beampattern measurements, range testing, and the ability to measure the velocity of a moving plate. The sensor is capable of measuring the velocity of a moving reflector with a resolution of 6 cm/s, at an update rate of 0.016 s, and with a range of 1.5 m (3 m round trip).

Citation Information
Minchul Shin, Zhengxin Zhao, Paul DeBitetto and Robert D. White. "Acoustic Velocity Measurement System Using CMUT Technology and a Nickel-on-Glass Process" Sensors and Actuators A: Physical Vol. 208 (2014) p. 37 - 49 ISSN: 0924-4247
Available at: http://works.bepress.com/minchul-shin/2/