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Presentation
In Situ Coupled with Modeling to Improve Control and Operation of CMP Processes
SRC Engineering Research Center on Environmentally Benign Semiconductor Manufacturing (2009)
  • Minchul Shin, Georgia Southern University
  • James Vlahakis, Tufts University
  • Caprice Gray, Tufts University
  • Nicole Braun, Tufts University
  • Douglas Gauthier, Tufts University
  • Robert D. White, Tufts University
  • Chris B. Rogers, Tufts University
  • Vincent P. Manno, Tufts University
Abstract
This presentation was given to the SRC Engineering Research Center on Environmentally Benign Semiconductor Manufacturing.
Keywords
  • Situ,
  • Coupled,
  • Modeling,
  • Improve control,
  • Operation,
  • CMP processes
Publication Date
February, 2009
Location
Tucsan, AZ
Citation Information
Minchul Shin, James Vlahakis, Caprice Gray, Nicole Braun, et al.. "In Situ Coupled with Modeling to Improve Control and Operation of CMP Processes" SRC Engineering Research Center on Environmentally Benign Semiconductor Manufacturing (2009)
Available at: http://works.bepress.com/minchul-shin/12/