Application-specific oxide-based and metal-dielectric thin film materials prepared by RF magnetron sputtering(2019)
We report on the development of several different thin-film functional material systems 10 prepared by RF magnetron sputtering at Edith Cowan University nanofabrication labs. We conduct 11 research on the design, prototyping, and practical fabrication of high-performance magneto-optic 12 (MO) materials, oxide based sensor components, and heat regulation coatings for advanced 13 construction and solar windows.
- thin films,
- heat regulation
Publication DateSummer August 17, 2019
Citation InformationMikhail Vasiliev. "Application-specific oxide-based and metal-dielectric thin film materials prepared by RF magnetron sputtering" (2019)
Available at: http://works.bepress.com/mikhail_vasiliev/147/