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Application-specific oxide-based and metal-dielectric thin film materials prepared by RF magnetron sputtering
(2019)
  • Mikhail Vasiliev
Abstract
We report on the development of several different thin-film functional material systems 10 prepared by RF magnetron sputtering at Edith Cowan University nanofabrication labs. We conduct 11 research on the design, prototyping, and practical fabrication of high-performance magneto-optic 12 (MO) materials, oxide based sensor components, and heat regulation coatings for advanced 13 construction and solar windows.
Keywords
  • thin films,
  • coatings,
  • magneto-optics,
  • sensors,
  • glass,
  • heat regulation
Publication Date
Summer August 17, 2019
DOI
doi:10.20944/preprints201908.0184.v1
Citation Information
Mikhail Vasiliev. "Application-specific oxide-based and metal-dielectric thin film materials prepared by RF magnetron sputtering" (2019)
Available at: http://works.bepress.com/mikhail_vasiliev/147/