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Selected Works of Michele Miller
Article
Investigation of air damping and Q in a MEMS resonant mass sensor
Engineering, School of
  • C. Li
  • M. H. Miller
Document Type
Conference Proceeding
Date of Publication
1-1-2008
Event
ASPE Annual Meeting
Disciplines
Citation Information
C. Li and M. H. Miller. "Investigation of air damping and Q in a MEMS resonant mass sensor" (2008)
Available at: http://works.bepress.com/michele-miller/89/