Article
Optimization strategy for resonant mass sensor design in the presence of squeeze film damping
Micromachines
Document Type
Article
Date of Publication
1-1-2010
Disciplines
DOI
https://doi.org/10.3390/microm1010112
Citation Information
C. Li and M. H. Miller. "Optimization strategy for resonant mass sensor design in the presence of squeeze film damping" Micromachines Vol. 1 Iss. 3 (2010) p. 112 - 128 Available at: http://works.bepress.com/michele-miller/16/