"Spectroscopic analysis of Al and N diffusion in HfO2" by P. S. Lysaght

Selected Works of Mehmet A. Sahiner

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Article

Spectroscopic analysis of Al and N diffusion in HfO2

Journal of Applied Physics (2012)

P. S. Lysaght
J. C. Woicik
M. A. Sahiner
J. Price
C. Weiland
P. D. Kirsch

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Disciplines

Atomic, Molecular and Optical Physics and
Analytical Chemistry

Publication Date

September 15, 2012

DOI

10.1063/1.4754578

Citation Information

P. S. Lysaght, J. C. Woicik, M. A. Sahiner, J. Price, et al.. "Spectroscopic analysis of Al and N diffusion in HfO2" Journal of Applied Physics Vol. 112 Iss. 6 (2012) p. 64118
Available at: http://works.bepress.com/mehmet_sahiner/21/