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Article
Local structural phase determination of Ni silicide thin films using EXAFS
Physica Status Solidi (c) (2012)
  • M. A. Sahiner, Seton Hall University
  • P. Y. Hung, SEMATECH
  • W.-Y. Loh, SEMATECH
  • P. S. Lysaght, SEMATECH
  • J. C. Woicik, National Institute of Standards and Technology
  • D. Guerrero, Seton Hall University
Disciplines
Publication Date
October 1, 2012
DOI
10.1002/pssc.201200250
Citation Information
M. A. Sahiner, P. Y. Hung, W.-Y. Loh, P. S. Lysaght, et al.. "Local structural phase determination of Ni silicide thin films using EXAFS" Physica Status Solidi (c) Vol. 9 (2012) p. 2184 - 2188
Available at: http://works.bepress.com/mehmet_sahiner/20/