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Selected Works of Mehmet A. Sahiner
Article
Zr-induced structural changes in Hf1−xZrxO2 high-k thin films
Applied Physics A (2014)
  • M. A. Sahiner, Seton Hall University
  • P. S. Lysaght, SEMATECH
  • J. Price, SEMATECH
  • P. D. Kirsch, SEMATECH
  • J. C. Woicik, National Institute of Standards and Technology
  • A. Klump, Seton Hall University
  • C. Reehil, Seton Hall University
  • W. A. Manners, Seton Hall University
  • A. Nabizadeh, Seton Hall University
Link
Disciplines
Publication Date
October 1, 2014
DOI
10.1007/s00339-013-8208-z
Citation Information
M. A. Sahiner, P. S. Lysaght, J. Price, P. D. Kirsch, et al.. "Zr-induced structural changes in Hf1−xZrxO2 high-k thin films" Applied Physics A Vol. 117 Iss. 1 (2014) p. 93 - 96
Available at: http://works.bepress.com/mehmet_sahiner/16/