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Synchrotron XPS and EXAFS Identification of Chemical State and Crystal Phase Changes of HfO2 Films Doped with Si, N, Al, and La
VLSI Technology Systems and Applications (VLSI-TSA), 2010 International Symposium (2010)
  • P.S. Lysaght
  • J.C. Woicik
  • Mehmet A. Sahiner
  • C.S Park
  • J. Huang
  • G. Bersuker
  • W. Taylor
  • P.D. Kirsch
  • R. Jammy
Disciplines
Publication Date
April, 2010
Citation Information
P.S. Lysaght, J.C. Woicik, Mehmet A. Sahiner, C.S Park, et al.. "Synchrotron XPS and EXAFS Identification of Chemical State and Crystal Phase Changes of HfO2 Films Doped with Si, N, Al, and La" VLSI Technology Systems and Applications (VLSI-TSA), 2010 International Symposium (2010)
Available at: http://works.bepress.com/mehmet_sahiner/1/