In the present study, a mathematical model for the synthesis of $SiO_2$ nanoparticles in a radio frequency (RF) inductively coupled plasma (ICP) with a supersonic nozzle is developed and validated on the basis of comparisons with existing experimental data. The temperature and flow profile is numerically determined by the electromagnetic fluid dynamics approach with the consideration of chemical non-equilibrium of the plasma species for more accuracy. The material evaporation process and the precursor particle trajectory as well as the temperature history are examined by Lagrangian approach. The synthesis of silica nanoparticles is considered by homogeneous nucleation and the growth is caused by condensation and Brownian coagulation. Transport of particle occurs by convection, thermophoresis and Brownian diffusion. To describe the particle dynamics of the aerosol synthesis, the method of moments is used. The present modelling could be used as a guidance of the rational design of nanoparticles production using inductively coupled plasma with supersonic nozzle.
Available at: http://works.bepress.com/mbrak_el_morsli/14/