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Method of Reducing Internal Stress in Materials
Mechanical and Materials Engineering Faculty Publications
  • Maher S. Amer, Wright State University - Main Campus
  • John F. Maguire
Document Type
Patent
Publication Date
5-17-2005
Abstract
Methods are provided for adjusting and controlling the stress between layers of material in a multilayer structure. A first stress is configured in a region of stress on the substrate material. A second material is then deposited over the substrate. A second stress results between the substrate and the second material such that a net stress results where the net stress is a function of said first and second stresses. As such, the first stress can be configured to achieve a predetermined, desired net stress. For example, the first stress can be configured to cancel out the second stress such that the net stress is substantially zero.
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Publication Number: US6893986B2

Citation Information
Maher S. Amer and John F. Maguire. "Method of Reducing Internal Stress in Materials" (2005)
Available at: http://works.bepress.com/maher_amer/30/