Other
Method of Reducing Internal Stress in Materials
Mechanical and Materials Engineering Faculty Publications
Document Type
Patent
Publication Date
5-17-2005
Disciplines
Abstract
Methods are provided for adjusting and controlling the stress between layers of material in a multilayer structure. A first stress is configured in a region of stress on the substrate material. A second material is then deposited over the substrate. A second stress results between the substrate and the second material such that a net stress results where the net stress is a function of said first and second stresses. As such, the first stress can be configured to achieve a predetermined, desired net stress. For example, the first stress can be configured to cancel out the second stress such that the net stress is substantially zero.
Citation Information
Maher S. Amer and John F. Maguire. "Method of Reducing Internal Stress in Materials" (2005) Available at: http://works.bepress.com/maher_amer/30/
Publication Number: US6893986B2