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Article
Etching of Silicon in Fluoride Solutions
Surface Science
Document Type
Article
Publication Date
1-1-2009
Disciplines
Publisher
Elsevier
Citation Information
Kurt W. Kolasinski. "Etching of Silicon in Fluoride Solutions" Surface Science Vol. 603 Iss. 41559 (2009) p. 1904 - 1911 ISSN: 0039-6028 Available at: http://works.bepress.com/kurt_kolasinski/9/