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Article
Electroless Etching of Si with IO-3 and Related Species
Nanoscale Research Letters
  • Kurt Kolasinski, West Chester University
  • J W Gogola
Document Type
Article
Publication Date
6-20-2012
Disciplines
Abstract

We have previously derived seven requirements for the formulation of effective stain etchants and have demonstrated that Fe3+, Ce4+, and VO2 (+) + HF solutions are highly effective at producing nanocrystalline porous silicon. Here, we show that Cl-2, Br-2, I-2, ClO3 (-), BrO3 (-), IO3 (-), I-, and I-3 (-) induce etching of silicon when added to HF. However, using the strict definition that a pore is deeper than it is wide, we observe little evidence for porous layers of significant thickness but facile formation of pits. Iodate solutions are extremely reactive, and by the combined effects of IO3 (-), I-3 (-), I-2, and I-, these etchants roughen and restructure the substrate to form a variety of structures including (circular, rectangular, or triangular) pits, pyramids, or combinations of pits and pyramids without leaving a porous silicon layer of significant thickness.

Publisher
SpringerOpen
DOI
10.1186/1556-276X-7-323
Comments

Publisher's version at http://www.nanoscalereslett.com/content/7/1/323

Citation Information
Kurt Kolasinski and J W Gogola. "Electroless Etching of Si with IO-3 and Related Species" Nanoscale Research Letters Vol. 7 (2012) ISSN: 1931-7573
Available at: http://works.bepress.com/kurt_kolasinski/3/