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Article
Regenerative Electroless Etching of Silicon
Angewandte Chemie International Edition
  • Kurt W. Kolasinski, West Chester University of Pennsylvania
  • Nathan J. Gimbar, West Chester University of Pennsylvania
  • Haibo Yu, University of Connecticut - Storrs
  • Mark Aindow, University of Connecticut - Storrs
  • Ermei Mäkilä, University of Turku
  • Jarno Salonen, University of Turku
Document Type
Article
Publication Date
1-9-2017
Disciplines
Abstract

Regenerative electroless etching (ReEtching), described herein for the first time, is a method of producing nanostructured semiconductors in which an oxidant (Ox1) is used as a catalytic agent to facilitate the reaction between a semiconductor and a second oxidant (Ox2) that would be unreactive in the primary reaction. Ox2 is used to regenerate Ox1, which is capable of initiating etching by injecting holes into the semiconductor valence band. Therefore, the extent of reaction is controlled by the amount of Ox2 added, and the rate of reaction is controlled by the injection rate of Ox2. This general strategy is demonstrated specifically for the production of highly luminescent, nanocrystalline porous Si from the reaction of V2O5 in HF(aq) as Ox1 and H2O2(aq) as Ox2 with Si powder and wafers.

Publisher
Wiley
DOI
10.1002/ange.201610162
Comments

Final post-refereed draft is available from Digital Commons @ WCU after one year embargo.

Citation Information
Kurt W. Kolasinski, Nathan J. Gimbar, Haibo Yu, Mark Aindow, et al.. "Regenerative Electroless Etching of Silicon" Angewandte Chemie International Edition Vol. 129 Iss. 2 (2017) p. 639 - 642 ISSN: 1433-7851
Available at: http://works.bepress.com/kurt_kolasinski/24/