
Presentation
Tailorable, 3D microfabrication for photonic applications: Two-polymer microtransfer molding
Proceedings of SPIE
Document Type
Conference Proceeding
Disciplines
Conference
Photonic Crystal Materials and Devices IV
Publication Version
Published Version
Publication Date
3-1-2006
DOI
10.1117/12.645303
Conference Date
February 28, 2006
Geolocation
(37.3382082, -121.88632860000001)
Abstract
For photonic devices, extending beyond the planar regime to the third dimension can allow a higher degree of integration and novel functionalities for applications such as photonic crystals and integrated optical circuits. Although conventional photolithography can achieve both high quality and structural control, it is still costly and slow for threedimensional (3D) fabrication. Moreover, as diverse functional polymers emerge, there is potential to develop new techniques for quick and economical fabrication of 3D structures. We present a 3D microfabrication technique based on the soft lithographic technique, called two-polymer microtransfer molding (2P-µTM) to accomplish low cost, high structural fidelity and tailorable 3D microfabrication for polymers. Using 2P-µTM, highly layered polymeric microstructures are achievable by stacking planar structures layer by layer. For increased processing control, the surface chemistry of the polymers is characterized as a function of changing ultraviolet dosage to optimize yield in layer transfer. We discuss the application of the 2P-µTM to build polymer templates for woodpile photonic crystals, and demonstrate methods for converting the polymer templates to dielectric and metallic photonic crystal structures. Finally, we will show that 2P-µTM is promising for fabricating 3D polymeric optical waveguides.
Copyright Owner
SPIE--The International Society for Optical Engineering
Copyright Date
2006
Language
en
File Format
application/pdf
Citation Information
Jae-Hwang Lee, Chang-Hwan Kim, Kristen P. Constant and Kai-Ming Ho. "Tailorable, 3D microfabrication for photonic applications: Two-polymer microtransfer molding" San Jose, CAProceedings of SPIE Vol. 6128 (2006) p. 612805 Available at: http://works.bepress.com/kristen_constant/36/
This proceeding is published as Jae-Hwang Lee ; Chang-Hwan Kim ; Kristen Constant and Kai-Ming Ho "Tailorable 3D microfabrication for photonic applications: two-polymer microtransfer molding", Proc. SPIE 6128, Photonic Crystal Materials and Devices IV, 612805 (February 28, 2006); doi: 10.1117/12.645303. Posted with permission.