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Presentation
Power and Charge Deposition in Multilayer Dielectrics from Monoenergetic Electron Bombardment
Four Corner Sections Meeting American Physical Society New Mexico Tech Socorro, NM October 26 & 27, 2012
  • Gregory Wilson, Utah State University
  • Amberly Evans, Utah State University
  • Justin Dekany, Utah State University
  • JR Dennison, Utah State Univesity
Document Type
Presentation
Publication Date
10-26-2012
Disciplines
Abstract

Power and charge deposition in multilayer dielectrics from electron bombardment is dependent upon the flux and electron range of the electron beam, where the range,--a lso known as the penetration depth—is dependent upon the incident beam energy. Using the Continuous Slow Down Approximation (CSDA), a composite analytical formula has been developed to relate the electron range to the dose rate and subsequently to the deposited power in each subsequent layer. Based on the constituent layer geometry and material , the deposited charge can also be inferred. To validate these models two separate experiments were conducted, one based on the net surface potential and the second on electron induced luminescence. The first experiment used a disordered SiO2 based multilayer dielectric with a conductive middle layer. The sample was charged using 15 s pulses from an electron beam with an energy range from 200 eV to 5 keV. The second experiment also used a disordered SiO2 based multilayer dielectric, but with energies from 5 keV to 25 keV. Results of these experiments showed the power and charge deposition’s dependence on electron beam flux and incident energy, which compare favorably with the model predictions *Work supported by the NASA Goddard Space Flight Center.

Comments

Presented at the Four Corner Sections Meeting American Physical Society New Mexico Tech Socorro, NM October 26 & 27, 2012.

Work supported by the NASA Goddard Space Flight Center.

Citation Information
Gregory Wilson, Amberly Evans, Justin Dekany and JR Dennison. "Power and Charge Deposition in Multilayer Dielectrics from Monoenergetic Electron Bombardment" Four Corner Sections Meeting American Physical Society New Mexico Tech Socorro, NM October 26 & 27, 2012 (2012)
Available at: http://works.bepress.com/justin_dekany/3/