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Epitaxial rutile TiO2 film based on MgF2 substrate for ultraviolet detector
Journal of Alloys and Compounds (2016)
  • Yanru Xie, Liaocheng Universtiy
  • Lin Wei
  • Qinghao Li, Shandong University
  • Yanxue Chen, Shandong University
  • Shishen Yan
  • Jun Jiao, Portland State University
  • Liu Guo-Lei, Shandong University
  • Liangmo Mei, Shandong University
High-quality epitaxial rutile TiO2 (110) thin films have been fabricated on MgF2 (110) substrates by pulsed laser deposition (PLD). The samples were characterized with respect to their structural, morphological, and optical properties using various methods such as X-ray diffraction (XRD), transmission electron microscopy (TEM), Raman spectroscopy and UV-Vis spectroscopy. The results demonstrated that the synthesized TiO2 thin films were pure rutile phase, untwined (110)-oriented epitaxial thin films. In order to test the UV photoresponse of the epitaxial TiO2 thin film, interdigitated Ni/TiO2/Ni structure was designed and fabricated, which exhibits excellent UV response performance. For the spectral response, a maximum of 4.85 A/W occurs at about 300 nm at 5 V applied bias. The UV detector exhibits excellent photoresponse characteristics with a small bias for detecting application in a wide wavelength range.
Publication Date
April, 2016
Citation Information
Xie, Y., Wei, L., Li, Q., Chen, Y., Yan, S., Jiao, J., Guo-Lei, L., & Mei, L. (2016). Epitaxial rutile TiO2 film based on MgF2 substrate for ultraviolet detector. Journal of Alloys and Compounds.