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The Structure and Properties of Amorphous Indium Oxide
Chemistry of Materials
  • D. Bruce Buchholz
  • Qing Ma
  • Diego Alducin
  • Arturo Ponce
  • Miguel Jose-Yacaman
  • Rabi Khanal
  • Julia E. Medvedeva, Missouri University of Science and Technology
  • Robert P. Chang
A series of In2O3 thin films, ranging from X-ray diffraction amorphous to highly crystalline, were grown on amorphous silica substrates using pulsed laser deposition by varying the film growth temperature. The amorphous-tocrystalline transition and the structure of amorphous In2O3 were investigated by grazing angle X-ray diffraction (GIXRD), Hall transport measurement, high resolution transmission electron microscopy (HRTEM), electron diffraction, extended X-ray absorption fine structure (EXAFS), and ab initio molecular dynamics (MD) liquid-quench simulation. On the basis of excellent agreement between the EXAFS and MD results, a model of the amorphous oxide structure as a network of InOx polyhedra was constructed. Mechanisms for the transport properties observed in the crystalline, amorphous-to-crystalline, and amorphous deposition regions are presented, highlighting a unique structure-property relationship.
Research Center/Lab(s)
Center for High Performance Computing Research
Keywords and Phrases
  • Crystalline Materials,
  • Deposition,
  • Extended X Ray Absorption Fine Structure Spectroscopy,
  • Film Growth,
  • High Resolution Transmission Electron Microscopy,
  • Indium,
  • Molecular Dynamics,
  • Pulsed Laser Deposition,
  • X Ray Absorption,
  • X Ray Diffraction,
  • Ab Initio Molecular Dynamics,
  • Amorphous Indium-Oxide,
  • Amorphous Oxides,
  • Extended X-Ray Absorption Fine Structures,
  • Grazing Angle X-Ray Diffraction,
  • Structure and Properties,
  • Structure Property Relationships,
  • Transport Measurements,
  • Amorphous Films
Document Type
Article - Journal
Document Version
File Type
© 2014 American Chemical Society (ACS), All rights reserved.
Publication Date
Citation Information
D. Bruce Buchholz, Qing Ma, Diego Alducin, Arturo Ponce, et al.. "The Structure and Properties of Amorphous Indium Oxide" Chemistry of Materials Vol. 26 Iss. 18 (2014) p. 5401 - 5411 ISSN: 0897-4756
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