Reactions between Ti and SiO2 were studied at 1373 K (1100°C) under vacuum conditions using planar diffusion couples. A method to correct for the presence of surface oxide was developed which led to improved oxygen measurements with the electron probe microanalyzer. An isothermal section through the Ti-Si-O phase diagram at 1373 K was determined using measured diffusion paths and phase compositions in equilibrated alloys. The experimentally determined isothermal section was compared to isothermal sections calculated using thermodynamic data. In addition the sequence of reaction layers formed in the diffusion couples is discussed in terms of thermodynamic activity diagrams.