X-ray detection by energy-dispersive spectrometry in the analytical electron microscope (AEM) is often limited by low collected X-ray intensity (P), modest peak-to-background (P/B) ratios, and limitations on total counting time (τ) due to specimen drift and contamination. A new AEM has been designed with maximization of P, P/B, and τ as the primary considerations. Maximization of P has been accomplished by employing a field-emission electron gun, X-ray detectors with high collection angles, high-speed beam blanking to allow only one photon into the detector at a time, and simultaneous collection from two detectors. P/B has been maximized by reducing extraneous background signals generated at the specimen holder, the polepieces and the detector collimator. The maximum practical τ has been increased by reducing specimen contamination and employing electronic drift correction. Performance improvements have been measured using the NIST standard Cr thin film. The 0·3 steradian solid angle of X-ray collection is the highest value available. The beam blanking scheme for X-ray detection provides 3–4 times greater throughput of X-rays at high count rates into a recorded spectrum than normal systems employing pulsepileup rejection circuits. Simultaneous X-ray collection from two detectors allows the highest X-ray intensity yet recorded to be collected from the NIST Cr thin film. The measured P/B of 6300 is the highest level recorded for an AEM. In addition to collected X-ray intensity (cps/nA) and P/B measured on the standard Cr film, the product of these can be used as a figure-of-merit to evaluate instruments. Estimated minimum mass fraction (MMF) for Cr measured on the standard NIST Cr thin film is also proposed as a figure-of-merit for comparing X-ray detection in AEMs. Determinations here of the MMF of Cr detectable show at least a threefold improvement over previous instruments.
- Analytical electron microscopy,
- X-ray spectrometry,
- thin specimens,
- chromium thin film test specimen,
- X-ray intensity,
- beam blanking,
- peak-to-background,
- hole count,
- elemental detectability,
- figure-of-merit
Available at: http://works.bepress.com/joseph_goldstein/6/