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Power MEMS and Microengines
1990-1999
  • Alan H. Epstein, Massachusetts Institute of Technology
  • Stephen D. Senturia, Massachusetts Institute of Technology
  • G. K. Ananthasuresh, Massachusetts Institute of Technology
  • Arturo A. Ayon, Massachusetts Institute of Technology
  • Kenneth S. Breuer, Massachusetts Institute of Technology
  • Kuo-Shen Chen, Massachusetts Institute of Technology
  • Fredric F. Ehrich, Massachusetts Institute of Technology
  • Gautam Gauba, Massachusetts Institute of Technology
  • Reza Ghodssi, Massachusetts Institute of Technology
  • C. Groshenry, Massachusetts Institute of Technology
  • Stuart A. Jacobson, Massachusetts Institute of Technology
  • Jeffrey H. Lang, Massachusetts Institute of Technology
  • Chuang-Chia Lin, Massachusetts Institute of Technology
  • Amit Mehra, Massachusetts Institute of Technology
  • José Oscar Mur-Miranda, Franklin W. Olin College of Engineering
  • Steve Nagle, Massachusetts Institute of Technology
  • D. J. Orr, Massachusetts Institute of Technology
  • Ed Piekos, Massachusetts Institute of Technology
  • Martin A. Schmidt, Massachusetts Institute of Technology
  • Gregory Shirley, Massachusetts Institute of Technology
  • Mark S. Spearing, Massachusetts Institute of Technology
  • Choon S. Tan, Massachusetts Institute of Technology
  • Sheng-Yang Tzeng, Massachusetts Institute of Technology
  • Ian A. Waitz, Massachusetts Institute of Technology
Document Type
Conference Proceeding
Publication Date
6-1-1997
Abstract
MIT is developing a MEMS-based gas turbine generator. Based on high speed rotating machinery, this 1 cm diameter by 3 mm thick SiC heat engine is designed to produce 10-20 W of electric power while consuming 10 grams/hr of H2. Later versions may produce up to 100 W using hydrocarbon fuels. The combustor is now operating and an 80 W micro-turbine has been fabricated and is being tested. This engine can be considered the first of a new class of MEMS device, power MEMS, which are heat engines operating at power densities similar to those of the best large scale devices made today.
Comments

© 1997 IEEE. This article was published in the 1997 International Conference on Solid State Sensors and Actuators, vol. 2, pp. 753-756 and may be found here.

Citation Information
Alan H. Epstein, Stephen D. Senturia, G. K. Ananthasuresh, Arturo A. Ayon, et al.. "Power MEMS and Microengines" (1997)
Available at: http://works.bepress.com/joseoscar_mur-miranda/2/