Article
Miniaturized Optical Fiber Fabry-Perot Interferometer Fabricated by Femtosecond Laser Irradiation and Selective Chemical Etching
Proceedings of SPIE, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII
Abstract
A U-shaped optical fiber inline microchannel was fabricated by femtosecond laser irradiation and subsequent selective chemical wet etching. A high quality micro-cavity embedded inside the channel was obtained to construct a Fabry-Perot interferometer (FPI). A fringe visibility of 20 dB in spectrum domain was achieved. High temperature survivability of this micro device was also demonstrated. The proposed assembly-free optical fiber inline interferometer is attractive for sensing applications in high-temperature harsh environments.
Meeting Name
SPIE MOEMS-MEMS (2014: Feb. 3-5, San Francisco, CA)
Department(s)
Electrical and Computer Engineering
Keywords and Phrases
- Fabry-Perot interferometers,
- Optical fibers,
- Ultrashort pulses,
- Uranium,
- Chemical etching,
- Chemical wet etching,
- Fiber fabry-perot interferometers,
- Fringe visibilities,
- Harsh environment,
- High temperature,
- Sensing applications,
- Temperature sensing,
- Optical fiber fabrication,
- Fs laser irradiation,
- Selective chemical etching
International Standard Book Number (ISBN)
978-0819498878
Document Type
Article - Conference proceedings
Document Version
Citation
File Type
text
Language(s)
English
Rights
© 2014 SPIE, All rights reserved.
Publication Date
2-1-2014
Publication Date
01 Feb 2014
Disciplines
Citation Information
Lei Yuan, Xinwei Lan, Jie Huang, Hanzheng Wang, et al.. "Miniaturized Optical Fiber Fabry-Perot Interferometer Fabricated by Femtosecond Laser Irradiation and Selective Chemical Etching" Proceedings of SPIE, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII Vol. 8974 (2014) ISSN: 0277-786X Available at: http://works.bepress.com/jie-huang/61/