Skip to main content
Article
Femtosecond Laser Processing of Glass Materials for Assembly-Free Fabrication of Photonic Microsensors
Advances in Science and Technology
  • Lei Yuan
  • Xinwei Lan
  • Jie Huang, Missouri University of Science and Technology
  • Hai Xiao, Missouri University of Science and Technology
Abstract

Research and development in photonic micro/nano devices and structures have experienced a significant growth in recent years, fueled by their broad applications as sensors for in situ measurement of a wide variety of physical, chemical and biological quantities. Recent advancement in ultrafast and ultra-intense pulsed laser technology has opened a new window of opportunity for one-step fabrication of micro- and even nano-scale 3D structures in various solid materials. When used for fabrication, fs lasers have many unique advantages such as negligible cracks, minimal heat-affected-zone, low recast, and high precision. These advantages enable the unique opportunity to fabricate integrated sensors with unprecedented performance, enhanced functionalities and improved robustness. This paper summarizes our recent research progresses in the understanding, design, fabrication, characterization of various photonic sensors for energy, defense, environmental, biomedical and industry applications. Femtosecond laser processing/ablation of various glass materials (fused silica, doped silica, sapphire, etc.) is discussed towards the goal of one-step fabrication of novel photonic sensors and new enabling photonic devices. A number of new photonic devices and sensors are also presented.

Meeting Name
13th International Ceramics Congress, part of CIMTEC 2014-13th International Ceramics Congress and 6th Forum on New Materials (2014: Jun. 8-13, Montecatini Terme, Italy)
Department(s)
Electrical and Computer Engineering
Keywords and Phrases
  • Femtosecond laser micromachining,
  • Glass material,
  • Photonic sensor
International Standard Book Number (ISBN)
978-3-03835-302-7
Document Type
Article - Conference proceedings
Document Version
Citation
File Type
text
Language(s)
English
Rights
© 2014 Trans Tech Publications, All rights reserved.
Publication Date
10-1-2014
Publication Date
01 Oct 2014
Citation Information
Lei Yuan, Xinwei Lan, Jie Huang and Hai Xiao. "Femtosecond Laser Processing of Glass Materials for Assembly-Free Fabrication of Photonic Microsensors" Advances in Science and Technology Vol. 90 (2014) p. 166 - 173 ISSN: 1662-0356
Available at: http://works.bepress.com/jie-huang/36/