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Electron Impact Vibrational Excitation Cross Sections of SiF4
Applied Physics Letters
  • R. Nagpal
  • A. Garscadden
  • Jerry D. Clark, Wright State University - Main Campus
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Electron drift velocities in mixtures of SiF4 and Ar have been measured using a pulsed‐Townsend type drift tube. A set of vibrational excitation cross sections of electron scattering in SiF4 has been subsequently determined by the swarm analyses of measured transport data in highly dilute SiF4−Ar mixtures. The derived cross sections are consistent with the electron transport properties over an order of magnitude in SiF4 concentration in gas mixtures, thus providing evidence that the main features of their near threshold behavior, and of their absolute magnitude have been captured.

Copyright © 1996, American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Applied Physics Letters 68.16, and may be found at

Citation Information
R. Nagpal, A. Garscadden and Jerry D. Clark. "Electron Impact Vibrational Excitation Cross Sections of SiF4" Applied Physics Letters Vol. 68 Iss. 16 (1996) p. 2189 - 2191 ISSN: 0003-6951
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