Electron drift velocities in mixtures of SiF4 and Ar have been measured using a pulsed‐Townsend type drift tube. A set of vibrational excitation cross sections of electron scattering in SiF4 has been subsequently determined by the swarm analyses of measured transport data in highly dilute SiF4−Ar mixtures. The derived cross sections are consistent with the electron transport properties over an order of magnitude in SiF4 concentration in gas mixtures, thus providing evidence that the main features of their near threshold behavior, and of their absolute magnitude have been captured.