Article
Micro-supercapacitors from carbide derived carbon (CDC) films on silicon chips
Journal of Power Sources
(2013)
Abstract
Interdigitated on-chip micro-supercapacitors based on Carbide Derived Carbon (CDC) films were fabricated and tested. A titanium carbide (TiC) film was patterned and treated with chlorine to obtain a TiC derived carbon (TiC–CDC) film, followed by the deposition of two types of current collectors (Ti/Au and Al) using standard micro-fabrication processes. CDC based micro-supercapacitors were electrochemically characterized by cyclic voltammetry and impedance spectroscopy using a 1 M tetraethylammonium tetrafluoroborate, NEt4BF4, in propylene carbonate (PC) electrolyte. A capacitance of 0.78 mF for the device and 1.5 mF cm−2 as the specific capacitance for the footprint of the device was measured for a 2 V potential range at 100 mV s−1. A specific energy of 3.0 mJ cm−2 and a specific power of 84 mW cm−2 were calculated for the devices. These devices provide a pathway for fabricating pure carbon-based micro-supercapacitors by micro-fabrication, and can be used for powering micro-electromechanical systems (MEMS) and electronic devices.
Keywords
- Carbide derived carbon,
- Micro-supercapacitors,
- MEMS,
- Electrochemical capacitor
Disciplines
Publication Date
March, 2013
DOI
10.1016/j.jpowsour.2012.10.020
Citation Information
Peihua Huang, Min Heon, David Pech, Magali Brunet, et al.. "Micro-supercapacitors from carbide derived carbon (CDC) films on silicon chips" Journal of Power Sources Vol. 225 (2013) p. 240 - 244 ISSN: 0378-7753 Available at: http://works.bepress.com/jeffrey-hettinger/4/