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High-Precision Absolute Distance and Vibration Measurement with Frequency Scanned Interferometry
Applied Optics
  • Hai-Jun Yang
  • Jason A. Deibel, Wright State University - Main Campus
  • Sven Nyberg
  • Keith Riles
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We report high-precision absolute distance and vibration measurements performed with frequency scanned interferometry using a pair of single-mode optical fibers. Absolute distance was determined by counting the interference fringes produced while scanning the laser frequency. A high-finesse Fabry–Perot interferometer was used to determine frequency changes during scanning. Two multiple-distance-measurement analysis techniques were developed to improve distance precision and to extract the amplitude and frequency of vibrations. Under laboratory conditions, measurement precision of ∼50 nm was achieved for absolute distances ranging from 0.1 to 0.7 m by use of the first multiple-distance-measurement technique. The second analysis technique has the capability to measure vibration frequencies ranging from 0.1 to 100 Hz with an amplitude as small as a few nanometers without a priori knowledge.

Citation Information
Hai-Jun Yang, Jason A. Deibel, Sven Nyberg and Keith Riles. "High-Precision Absolute Distance and Vibration Measurement with Frequency Scanned Interferometry" Applied Optics Vol. 44 Iss. 19 (2005) p. 3937 - 3944 ISSN: 1559128X
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