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Article
Macro-trench studies of the surface reaction probability in a-Si:H deposition
Journal of Applied Physics (1994)
  • A. Nurrudin, University of Illinois at Urbana-Champaign
  • James Doyle, Macalester College
  • J.R. Abelson, University of Illinois at Urbana-Champaign
Disciplines
Publication Date
1994
Citation Information
A. Nurrudin, James Doyle and J.R. Abelson. "Macro-trench studies of the surface reaction probability in a-Si:H deposition" Journal of Applied Physics Vol. 258 Iss. 33 (1994)
Available at: http://works.bepress.com/james_doyle/15/