"Effect of anode bias on plasma confinement in dc magnetron discharges" by James Doyle

Selected Works of James R. Doyle

Follow Contact

Article

Effect of anode bias on plasma confinement in dc magnetron discharges

Journal of Vacuum Science and Technology (1994)

James Doyle, Macalester College
A. Nurrudin
J. R. Abelson

Find in your library

Disciplines

Physics

Publication Date

1994

Citation Information

James Doyle, A. Nurrudin and J. R. Abelson. "Effect of anode bias on plasma confinement in dc magnetron discharges" Journal of Vacuum Science and Technology Vol. A12 (1994)
Available at: http://works.bepress.com/james_doyle/12/