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Article
Effect of anode bias on plasma confinement in dc magnetron discharges
Journal of Vacuum Science and Technology (1994)
  • James Doyle, Macalester College
  • A. Nurrudin
  • J. R. Abelson
Disciplines
Publication Date
1994
Citation Information
James Doyle, A. Nurrudin and J. R. Abelson. "Effect of anode bias on plasma confinement in dc magnetron discharges" Journal of Vacuum Science and Technology Vol. A12 (1994)
Available at: http://works.bepress.com/james_doyle/12/