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Article
Hydrogen release kinetics during reactive magnetron sputter deposition of a‐Si:H: An isotope labeling study
Journal of Applied Physics (1994)
  • J. R. Abelson
  • L. Mandrell
  • James Doyle, Macalester College
Disciplines
Publication Date
1994
Citation Information
J. R. Abelson, L. Mandrell and James Doyle. "Hydrogen release kinetics during reactive magnetron sputter deposition of a‐Si:H: An isotope labeling study" Journal of Applied Physics Vol. 76 (1994)
Available at: http://works.bepress.com/james_doyle/11/