In this paper, we are reporting our recent efforts on the direct synthesis procedure of methyl phenoxy silane monomers by the reaction of elemental silicon with anisole, Ph-O-Me. This procedure gave about 4%, 8% and 40% of dimethyl diphenoxy, methyl triphenoxy and tetraphenoxy silane respectively under the experimental conditions. The anisole reacts with elemental silicon directly in the present of catalyst copper (I) chloride at a high temperature and pressure. The major products were teraphenoxy silane (40%), and small amount of methyl triphenoxy silane (8%) and dimethyl diphenoxy silane (4%).