"Characterization of reactive magnetron sputtering plasma during thin film deposition." by Rylan Gordon

Selected Works of Hasitha Mahabaduge

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Characterization of reactive magnetron sputtering plasma during thin film deposition.

Bulletin of the American Physical Society (2017)

Rylan Gordon
Hasitha Mahabaduge

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Disciplines

Materials Science and Engineering and
Semiconductor and Optical Materials

Publication Date

March 14, 2017

Citation Information

Rylan Gordon and Hasitha Mahabaduge. "Characterization of reactive magnetron sputtering plasma during thin film deposition." Bulletin of the American Physical Society (2017)
Available at: http://works.bepress.com/hasitha-mahabaduge/7/