"Characterization of thin film deposition processes in RF and DC sputtering using optical emission spectroscopy" by Amruta Nawarange

Selected Works of Hasitha Mahabaduge

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Characterization of thin film deposition processes in RF and DC sputtering using optical emission spectroscopy

Bulletin of the American Physical Society (2011)

Amruta Nawarange
Hasitha Mahabaduge
Kristopher Wieland
Alvin Compaan

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Disciplines

Materials Science and Engineering and
Semiconductor and Optical Materials

Publication Date

April 16, 2011

Citation Information

Amruta Nawarange, Hasitha Mahabaduge, Kristopher Wieland and Alvin Compaan. "Characterization of thin film deposition processes in RF and DC sputtering using optical emission spectroscopy" Bulletin of the American Physical Society (2011)
Available at: http://works.bepress.com/hasitha-mahabaduge/28/