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Article
Fabrication of Microlens Arrays in Photosensitive Glass by Femtosecond Laser Direct Writing
Applied Physics A: Materials Science and Processing
  • Cheng-Hsiang Lin
  • Hai Xiao, Missouri University of Science and Technology
  • Hai-Lung Tsai, Missouri University of Science and Technology
  • Lan Jiang, Missouri University of Science and Technology
  • Yen-Hsin Chai
  • Shean-Jen Chen
Abstract

This article reports the fabrication of high-fill-factor plano-convex cylindrical and spherical microlens arrays horizontally and vertically embedded in a photosensitive Foturan glass chip by femtosecond (fs) laser micromachining. The microlens arrays were fabricated by modifying the microstructure of Foturan glass using fs laser direct writing followed by thermal treatment, wet etching, and additional annealing. The focusing ability and image quality of the microlens arrays were examined, showing that the lens arrays not only can focus light well but also provide an imaging capability that holds great potential for lab-on-a-chip applications.

Department(s)
Electrical and Computer Engineering
Second Department
Mechanical and Aerospace Engineering
Document Type
Article - Journal
Document Version
Citation
File Type
text
Language(s)
English
Rights
© 2009 Springer-Verlag, All rights reserved.
Publication Date
12-1-2009
Publication Date
01 Dec 2009
Citation Information
Cheng-Hsiang Lin, Hai Xiao, Hai-Lung Tsai, Lan Jiang, et al.. "Fabrication of Microlens Arrays in Photosensitive Glass by Femtosecond Laser Direct Writing" Applied Physics A: Materials Science and Processing (2009) ISSN: 0947-8396
Available at: http://works.bepress.com/hai-lung-tsai/70/