Article
Advances in Femtosecond Laser Fabrication of Microchannels
Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology
Abstract
Major progresses in mechanism investigations and methodology developments in femtosecond laser fabrication of microchannels are reviewed, especially for femtosecond laser irradiation followed by chemical etching and liquid-assisted femtosecond laser drilling. In addition, key challenges and possible future research trends are briefly discussed.
Department(s)
Mechanical and Aerospace Engineering
Keywords and Phrases
- Femtosecond Laser,
- Microchannel,
- Modification
Document Type
Article - Journal
Document Version
Citation
File Type
text
Language(s)
English
Rights
© 2012 Beijing Institute of Technology, All rights reserved.
Publication Date
1-1-2012
Publication Date
01 Jan 2012
Disciplines
Citation Information
Hai-Lung Tsai, X.-L. Yan, S.-M. Wang, B. Xia, et al.. "Advances in Femtosecond Laser Fabrication of Microchannels" Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology (2012) Available at: http://works.bepress.com/hai-lung-tsai/32/