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Article
Fabrication of various curved relief structures through concave surface forming and soft replica molding
Microelectronic Engineering (2005)
  • Fang-Tzu Chuang
Abstract
In this case, our groups presented various optical structures through the presented method, involving concave surface forming and soft replica molding. The method of concave surface forming is mainly for the fabrication of concave surface. The method of soft replica molding is mainly for the fabrication of replica. Concave and convex relief structures, including circular curved relief structures, convex relief structures with platform structures on the top, refractive beam-shaping elements, these structures with dual curvatures and asymmetric structures, can be easily made through the presented method, respectively. All processes of manufacture are in several simple steps without multistep optical lithography and complex masks.  2005 Elsevier B.V. All rights reserved.
Keywords
  • Soft replica molding; Concave surface forming; Curved relief structures
Publication Date
Winter December 13, 2005
Citation Information
Fang-Tzu Chuang. "Fabrication of various curved relief structures through concave surface forming and soft replica molding" Microelectronic Engineering Vol. 83 (2005)
Available at: http://works.bepress.com/ft_chuang/5/