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Fabricating Microfluidic Valve Master Molds in SU‐8 Photoresist
The Journal of Micromechanics and Microengineering (2014)
  • Aaron J. Dy, Indiana University - Bloomington
  • Alin Cosmanescu, Indiana University - Bloomington
  • James Sluka, Indiana University - Bloomington
  • James A. Glazier, Indiana University - Bloomington
  • Dwayne Stupack, University of California - San Diego
  • Dragos Amarie, Indiana University - Bloomington
Multilayer soft lithography has become a powerful tool in analytical chemistry, biochemistry, material and life sciences, and medical research. Complex fluidic micro-circuits require reliable components that integrate easily into microchips. We introduce two novel approaches to master mold fabrication for constructing in-line micro-valves using SU-8. Our fabrication techniques enable robust and versatile integration of many lab-on-a-chip functions including filters, mixers, pumps, stream focusing and cell-culture chambers, with in-line valves. SU-8 created more robust valve master molds than the conventional positive photoresists used in multilayer soft lithography, but maintained the advantages of biocompatibility and rapid prototyping. As an example, we used valve master molds made of SU-8 to fabricate PDMS chips capable of precisely controlling beads or cells in solution.
  • Microfluidic chip,
  • On-Chip microvalve,
  • In-Line valve,
  • Multilayer soft lithography,
  • SPR-220,
  • SU-8,
  • Fabrication
Publication Date
April 1, 2014
Publisher Statement
Content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI. Article obtained from the The Journal of Micromechanics and Microengineering.
Citation Information
Aaron J. Dy, Alin Cosmanescu, James Sluka, James A. Glazier, et al.. "Fabricating Microfluidic Valve Master Molds in SU‐8 Photoresist" The Journal of Micromechanics and Microengineering Vol. 24 Iss. 5 (2014)
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