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Presentation
A Micro-Cantilever Based Photoacoustic Detector Of Terahertz Radiation For Chemical Sensing
38th International Conference on Infrared, Millimeter, and Terahertz Waves
  • Nathan E. Glauvitz
  • Ronald A. Coutu, Jr.
  • Douglas T. Petkie, Wright State University - Main Campus
  • Ivan Medvedev, Wright State University - Main Campus
Document Type
Conference Proceeding
Publication Date
9-1-2013
Catalog Record
Catalog Record
Abstract
A Microelectromechanical system (MEMS) cantilever pressure sensor was designed, modeled, fabricated, and tested for sensing the photoacoustic response of gases to Terahertz (THz) radiation. This paper describes manufacturing, experimental set-up and the most recent spectroscopic results, which demonstrate the capabilities of this spectroscopic technique.
Comments

Presented at the 38th International Conference on Infrared, Millimeter, and Terahertz Waves, Mainz, Germany, September 1-6, 2013.

DOI
10.1109/IRMMW-THz.2013.6665540
Citation Information
Nathan E. Glauvitz, Ronald A. Coutu, Douglas T. Petkie and Ivan Medvedev. "A Micro-Cantilever Based Photoacoustic Detector Of Terahertz Radiation For Chemical Sensing" 38th International Conference on Infrared, Millimeter, and Terahertz Waves (2013) p. 1 - 3 ISSN: 9781467347174
Available at: http://works.bepress.com/douglas_petkie/70/