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Presentation
Fabrication of Microelectromechanical Systems (MEMS) Cantilevers for Photoacoustic (PA) Detection of Terahertz (THz) Radiation
Proceedings of SPIE
  • R. Newberry
  • N. Glauvitz
  • R. Coutu, Jr.
  • Ivan Medvedev, Wright State University - Main Campus
  • Douglas T. Petkie, Wright State University - Main Campus
Document Type
Conference Proceeding
Publication Date
3-7-2014
Comments

Presented at the Micromachining and Microfabrication Process Technology XIX Conference, San Francisco, CA, February 4-6, 2014.

DOI
10.1117/12.2037376
Citation Information
R. Newberry, N. Glauvitz, R. Coutu, Ivan Medvedev, et al.. "Fabrication of Microelectromechanical Systems (MEMS) Cantilevers for Photoacoustic (PA) Detection of Terahertz (THz) Radiation" Proceedings of SPIE Vol. 8973 (2014) ISSN: 0277786X
Available at: http://works.bepress.com/douglas_petkie/30/